The Integrated Systems Nanofabrication Cleanroom (ISNC) core facility contains 9700 sq ft of cleanroom and support space arranged in a bay-chase design with 12 process bays. The facility has 4 class-100 yellow-room bays for lithographic processing, 6 class-1000 bays, and 2 integrated class-1000 bio-suite bays with their own isolated air supply for working with biologic samples within the cleanroom. The ISNC facility is located on the A-level the CNSI building.
A full complement of utilities including high-purity DI water, high-purity nitrogen, reactive gases, chilled water, etc. are available in each process bay. The latest advances in vibration isolation and electromagnetic shielding are integrated into the clean space to allow installation of the most sensitive and demanding fabrication and analysis equipment. Most process equipment can acomodate small pieces up to 6-inch diameter substrates. Device geometries down to 10 nm are possible using our state-of-the-art electron-beam writer (Vistec EBPG 5000 + ES).
The facility is open to UC Faculty, other universities, industry and government laboratories.
Facility Hours |
Staff Hours |
| 24 hours per day | 8 am - 10 pm |
| 7 days per week | Monday - Friday |
Our full-time professional staff is dedicated to providing support necesary to get our customers the results they need. Each staff member is dedicated to a specific process section and provides the following support.
- Process support
- Equipmemt training
- Equpment maintenence
- Safety monitoring
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Nanoelectronics Research Facility |
Electron Imaging Center for NanoMachines |
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Nano & Pico Characterization Lab |
Advanced Light Microscopy/ Spectroscopy |
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Integrated NanoMaterials Laboratory |
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Macro-Scale Imaging Laboratory |
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Center for Quantum Research |
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Molecular Screening Shared Resource |
