Tystar Mini 3600
Thermal Oxide up to 10 µm


Vistec EBPG 5000+ES
E-Beam Lithography

ASML PAS-5500 Stepper

Upcoming Events

New Member Orientations

Please See ISNC Calendar for Orientation Date, Time & Location

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New Member Instructions

Staff Hours & Holidays

Staff Hours:

Mon-Fri 7:00am to 10:00pm

University Holidays:

No Staff Coverage:

Febuary 18, 2013
March 29, 2013
May 27, 2013

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Integrated Systems Nanofabrication Cleanroom

Welcome to the Integrated Systems Nanofabrication Cleanroom (ISNC)

The mission of ISNC is to provide a state-of-the-art nanofabrication facility to UCLA researchers, industry users, and other educational and governmental institutions. ISNC supports the broader mission of the California NanoSystems Institute as one of the eight CNSI core facilities. The ISNC was created to support all aspects of nanofabrication-related research to advance learning and mentoring opportunities in nanoscience for scientists, students, teachers, and the general community.

The ISNC facility and equipment is open to users from the University of California, other Educational Institutions, Commercial Ventures, and Governmental Organizations. The use fees are structured on a pay-as-you-go model with no membership fee. We encourage you to contact us to find out how we can help you achieve your fabrication goals.

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Facility Information

Equipment Information